VABISHCHEVICH S, VABISHCHEVICH N, BRINKEVICH D, PROSOLOVICH V. PHYSICAL AND MECHANICAL PROPERTIES OF IRRADIATED FILMS OF DIAZOQUINONE-NOVOLACH PHOTORESIST ON SILICON. Вестник Полоцкого государственного университета. Серия С. Фундаментальные науки [Internet]. 2020Dec.30 [cited 2024Aug.24];(12):60-4. Available from: https://journals.psu.by/fundamental/article/view/461