PROBE DIAGNOSTICS OF CATHODIC ARC PLASMA, USED FOR SYNTHESIS OF DIAMOND-LIKE CARBON COATINGS
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Abstract
The pulse-periodic fluxes of cathodic arc plasma in vacuum as well as in acetylene atmosphere at pres-sures of 0,2 to 2 Pa used for diamond-like carbon coating deposition are generated as a result of graphite cathode sputtering in the four-electrode arc system with self-recovering thin-film conductor of ignition device. With the use of Langmuir probes it was found that the substrate is under accelerating floating potential of –15…35 V. The electron energy distribution function was found to be maxwellian with electron temperature of about 50 eV. Velocity of the most high-energy electrons of plasma flux exceeds 30 km/s while the velocity of directional motion of plasma amounts to 20 km/s in vacuum and 8 km/s in acetylene gas. So when applying a pulsed arc in acetylene atmosphere the noticeable decrease of carbon ions energy from 30 down to 4 eV is observed in comparison with a vacuum cathodic arc.
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References
Robertson, J. Diamond-like amorphous carbon / J. Robertson // Materials Science and Engineering. – 2002. – № 37. – Р. 129 – 281.
Grill, A. Diamond-like carbon: state of the art / A. Grill // Diamond and Related Materials. – 1999. – № 8. – Р. 428 – 434.
Experimental study of a pulse plasma flow in a mode of diamond-like coating deposition / I.P. Smyaglikov [et al.] // J. High Temperature Material Processes. – 2006. – № 8. – Issue 4. – P. 617 – 624.
Electrical erosion pulsed plasma accelerators for preparing diamond-like carbon coatings / E.I. Tochitsky [et al.] // Surface and Coating Technology. – 1991. – № 47. – P. 522 – 527.
Spectroscopic and probe diagnostics of carbon plasma flows of a pulse vacuum arc / I.P. Smyaglikov [et al.] // J. High Temperature Material Processes. – 2010. – № 14. – Issue 4. – P. 151 – 158.
Schott, L. Electric probes / L. Schott. In Plasma diagnostics; ed. W. Lochte-Holtgreven // North-Holland Publishing Company. – Amsterdam, 1968.
Smyaglikov, I.P. Spectroscopic diagnostics of a pulsed arc plasma in the presence of acetylene / I.P. Smyaglikov [et al.] // J. Vacuum. – 2013. – № 90. – P. 165 – 169.