POLYIMIDE FILMS IMPLANTED BY MANGANESE IONS
Article Sidebar
Main Article Content
Abstract
The optical and strength properties of Kapton polyimide films implanted with manganese ions with an energy of 40 keV and a dose of 5·1016 – 1·1017 cm–2 at a current density in the ion beam of 4 μA/cm2 have been studied. It has been experimentally established that during the process of ion implantation, modification of a thin nearsurface layer of polyimide occurs not only on the implanted side, but also on the reverse side of the film. Radiationstimulated modification of the back surface of the polyimide film leads to the formation of a surface layer up to 5 μm thick with increased microhardness. This may be due to the restructuring of metastable defects formed during the film manufacturing process and the simultaneous relaxation of elastic stresses in the surface layer. During the implantation process, a decrease in the intensity of absorption bands with maxima at ~ 2870 and ~ 2750 nm is observed, due to the evaporation of residual water under high vacuum conditions and reactions of residual solvent molecules, as well as radiation-induced processes on by-products of polyimide synthesis.
Article Details
This work is licensed under a Creative Commons Attribution 4.0 International License.
References
Brinkevich, D. I., Brinkevich, S. D., Vabishchevich, N. V., Odzhaev, V. B., & Prosolovich, V. S. (2014). Ion implantation of positive photoresists. Russian Microelectronics, 43(3), 194–200. DOI: 10.1134/S106373971401003X.
Larson, L. A., Williams, J. M., & Current, M. I. (2011). Ion Implantation for Semiconductor Doping and Materials Modification. Reviews of Accelerator Science and Technology, (4), 11–40. DOI: 10.1142/S1793626811000616
Kharchenko, A. A., Brinkevich, D. I., Brinkevich, S. D., Lukashevich, M. G., & Odzhaev, V. B. (2015). Radiationinduced modification of polymer surfaces. J. of Surface Investigation. X-ray, synchrotron and neutron techniques, 9(2), 371–376. DOI: 10.1134/S1027451015020317.
Vabishhevich, C. A., Brinkevich, D. I., Volobuev, V. S., Nazhim, F. A., Lukashevich, M. G., Valeev, V. F., … Odzhaev V. B. (2010). Fiziko-mehanicheskie svojstva pripoverhnostnyh sloev polijetilentereftalata i poliimida, modificirovannyh implantaciej ionov nikelja [Physicomechanical Properties of Surface Layers of Polyethylenterephtalate and Polyimide, Implanted by Nickel Ions]. Vestnik Polotskogo gosudarstvennogo universiteta. Seriya C, Fundamental'nye nauki [Herald of Polotsk State University. Series С. Fundamental sciences], (9), 74–82. (In Russ., abstr. in Engl.).
Brinkevich, D. I., Kharchenko, A. A., Brinkevich, S. D., Lukashevich, M. G., Odzhaev, V. B., Valeev, V .F., … Khaibullin, R. I. (2017). Radiation-induced modification of reflection spectra beyond the ion path region in polyimide films. J. of Surface Investigation. X-ray, synchrotron and neutron techniques, 11(4), 801–806. DOI: 10.1134/S1027451017040188.
Levshunova, V. L., Tetel'baum, D. I., & Pokhil, G. P. (2011). Oscillations of the Charge in Oxide at Silicon Surface as an Origin of the Process Leading to the Long-Range Effect. J. of Surface Investigation. X-ray, synchrotron and neutron techniques, 5(2), 276–278. DOI: 10.1134/S1027451011030141.
Brinkevich, D. I., Vabishhevich, N. V., & Vabishhevich, S. A. (2010). Fiziko-mehanicheskie svojstva jepitaksial'nyh sloev fosfida gallija [Physicomechanical Properties of Epitaxial Layers Gallium Phosphide]. Vestnik Polotskogo gosudarstvennogo universiteta. Seriya C, Fundamental'nye nauki [Herald of Polotsk State University. Series С. Fundamental sciences], (9), 92–97.
Vabishhevich, S. A., Vabishhevich, N. V., Brinkevich, D. I., & Prosolovich, V. S. (2020). Fiziko-mehanicheskie svojstva obluchennyh plenok diazohinon-novolachnogo fotorezista na kremnii [Physical and Mechanical Properties of Irradiated Films of Diazoquinone-Novolach Photoresist on Silicon]. Vestnik Polotskogo gosudarstvennogo universiteta. Seriya C, Fundamental'nye nauki [Herald of Polotsk State University. Series С. Fundamental sciences], (12), 60–64.
Anisovich, A. G. (2017). Opticheskie jeffekty pri mikroskopii nemetallicheskih materialov [Optical Effects at Nonmetallic Materials Microscopy]. Lit'e i metallurgija [Foundry production and metallurgy], (1), 110–114. DOI: 10.21122/1683-6065-2017-1-110-114. (In Russ., abstr. in Engl.).
Harchenko, A. A., Vabishhevich, S. A., Brinkevich, D. I., Lukashevich, M. G., & Odzhaev, V. B. (2014). Plenki poliimida, implantirovannye ionami bora [Polyimide Films Implanted by B+ Ions]. Vestnik Polotskogo gosudarstvennogo universiteta. Seriya C, Fundamental'nye nauki [Herald of Polotsk State University. Series С. Fundamental sciences], (4), 113–118. (In Russ., abstr. in Engl.).
Tetel'baum, D. I., Kuril'chik, E. V., Mendeleva, Ju. A., & Bystrova, O. I. (2009). Dal'nodejstvujushhee vlijanie sveta na mikrotverdost' fol'g aljuminija [Long-Range Action of Light on the Microhardness of Aluminium Foil]. Vestnik Nizhegorodskogo universiteta im. N. I. Lobachevskogo. Fizika tverdogo tela. [Vestnik of Lobachevsky State University of Nizhni Novgorod. Physics of the Solid State], (5), 42–47. (In Russ., abstr. in Engl.).
Brinkevich, D. I., Odzhaev, V. B., Prosolovich, V. S., & Yankovski, Yu. N. (2005). Radiation defects formation in silicon at high energy implantation. VACUUM. Surface engineering & vacuum technology, 78(2), 251–254.
Kharchenko, A. A., Brinkevich, D. I., Brinkevich, S. D., Lukashevich, M. G., & Odzhaev, V. B. (2015). Modification of the subsurface layers of polyimide films upon boron-ion implantation. J. of Surface Investigation. X-ray, synchrotron and neutron techniques, 9(1), 87–91. DOI: 10.1134/S1027451015010103.
Brinkevich, S. D., Grinyuk, E. V., Brinkevich, D. I., Sverdlov, R. L., Prosolovich, V. S., & Pyatlitski, A. N. (2020). Mechanism of the Adhesive Interaction of Diazoquinone-Novolac Photoresist Films with Monocrystalline Silicon. J. of Applied Spectroscopy, 87(4), 647–651. DOI: 10.1007/s10812-020-01049-4.
Vabishchevich, S. A., Brinkevich, S. D., Brinkevich, D. I., & Prosolovich, V. S. (2020). Adhesion of diazoquinon-novolac photoresist films with implanted boron and phosphorus ions to single-crystal silicon. High energy chemistry, 54(1), 46–50. DOI: 10.1134/S0018143920010129.
Kharchenko, A. A., Fedotova, Yu. A., Zur, I. A., Brinkevich, D. I., Brinkevich, S. D., … Lastovskii, S. B. (2022). Processes Induced in DLC/Polyimide Structures by Irradiation with 60Co γ-Rays. High Energy Chemistry, 56(5), 354–362. DOI: 10.1134/s0018143922050058.
Most read articles by the same author(s)
- S. VABISHCHEVICH, N. VABISHCHEVICH, D. BRINKEVICH, V. PROSOLOVICH, FILMS OF POSITIVE DIAZOQUINONE-NOVOLAC PHOTORESIST FP9120 IMPLANTED WITH SILVER IONS, Vestnik of Polotsk State University. Part C. Fundamental Sciences: No. 2 (2023)
- V. GOLOVCHUK, A. KHARCHENKO, D. BRINKEVICH, M. LUKASHEVICH, S. VABISHCHEVICH, N. VABISHCHEVICH, STRUCTURAL AND OPTICAL CHARACTERISTICS OF CARBON-CONTAINING SILICATE GLASS IMPLANTED BY COPPER IONS, Vestnik of Polotsk State University. Part C. Fundamental Sciences: No. 12 (2017)
- D. BRINKEVICH, M. LUKASHEVICH, V. PROSOLOVICH, A. KHARCHENKO, S. VABISHCHEVICH, N. VABISHCHEVICH, MICROHARDNESS OF POLYIMIDE AND POLYETHYLENE TEREPHTHALATE FILMS IRRADIATED WITH 60Co GAMMA QUANTA, Vestnik of Polotsk State University. Part C. Fundamental Sciences: No. 12 (2017)
- S. DOBROVOLSKI, A. SAVKOV, D. BRINKEVICH, S. BRINKEVICH, N. VABISHCHEVICH, IMPURITY RADIONUCLIDES AT A RADIOPHARMACEUTICAL PRODUCTION BASED ON A 18F, Vestnik of Polotsk State University. Part C. Fundamental Sciences: No. 4 (2017)
- S. VABISHCHEVICH, N. VABISHCHEVICH, D. BRINKEVICH, A. KHARCHENKO, M. LUKASHEVICH, V. PROSOLOVICH, S. BRINKEVICH, REFLECTION SPECTRA OF Γ-IRRADIATED FILMS OF DIAZOQUINONE-NOVOLAK PHOTORESIST, Vestnik of Polotsk State University. Part C. Fundamental Sciences: No. 4 (2017)
- A. VASUKOV, S. VABISHCHEVICH, V. KRISHTOPA, SCANNING SURFACES SOLID STRUCTURES AND OIL-WAIST VAR SYSTEMS BY ATOMIC FORCE MICROSCOPY, Vestnik of Polotsk State University. Part C. Fundamental Sciences: No. 4 (2017)
- M. LUKASHEVICH, CORRELATION OF ELECTRICAL, MAGNETIC AND GALVANOMAGNETIC PROPERTIES OF COMPOSITES PREPARED BY IMPLANTATION OF 3D-ELEMENTS IONS IN ZINC OXIDE, Vestnik of Polotsk State University. Part C. Fundamental Sciences: No. 4 (2016)
- S. VABISHCHEVICH, N. VABISHCHEVICH, D. BRINKEVICH, V. PROSOLOVICH, Y. YANKOVSKI, S. BRINKEVICH, STRENGTH PROPERTIES OF PHOTORESIST-SILICON STRUCTURES, Γ-IRRADIATED AND IMPLANTED BY B+ AND P+ IONS, Vestnik of Polotsk State University. Part C. Fundamental Sciences: No. 12 (2016)
- S. VABISHCHEVICH, N. VABISHCHEVICH, D. BRINKEVICH, S. BRINKEVICH, V. PROSOLOVICH, MICROHARDNESS OF Γ-IRRADIATED FILMS OF COPOLYMERS BASED ON METHYL METHACRYLATE, Vestnik of Polotsk State University. Part C. Fundamental Sciences: No. 12 (2016)
- M. LUKASHEVICH, MODIFICATION OF POLYIMIDE FILMS STRUCTURE BEYOND THE PROJECTED RANGE AT ION IMPLANTATION, Vestnik of Polotsk State University. Part C. Fundamental Sciences: No. 4 (2015)