Published: 2025-10-31

THE ELEMENTAL COMPOSITION OF NEGATIVE PHOTORESISTS FOR LIFT-OFF LITHOGRAPHY

S. ABRAMOV, D. BRINKEVICH, V. PROSOLOVICH, S. VABISHCHEVICH, O. ZUBOVA

18-25

PHYSICO-MECHANICAL PROPERTIES OF KMP E3502 NEGATIVE PHOTORESIST FILMS ON SILICON

S. VABISHCHEVICH, D. BRINKEVICH, V. PROSOLOVICH, S. BRINKEVICH, O. ZUBOVA, N. VABISHCHEVICH

26-32

METHODS OF TEMPERATURE VOLTAGE COMPENSATION ELECTRICAL BREAKDOWN OF NOISE DIODES

O. LATIY, V. BUSLYUK, S. DERECHENNIK, V. YEMELYANOV, О. KOCHERGINA, V. ODZHAEV, V. PROSOLOVICH, Yu. YANKOVSKI

39-49

P-I-N PHOTODIODES WITH GETTERS CREATED BY ION IMPLANTATION OF MAIN DOPING IMPURITIES

V. ODZHAEV, A. PYATLITSKI, V. PRASALOVICH, D. SHESTOVSKY, V. YAVID, YU. YANKOVSKI, B. ISMAYLOV, Z. KENZHAEV, N. VABISHCHEVICH

50-57

OPTICAL PROPERTIES OF DLC/POLYIMIDE STRUCTURES IRRADIATED WITH 60CO γ-QUANTA

A. KHARCHANKA, D. BRINKEVICH, I. ZUR, J. FEDOTOVA, Y. SHMANAY, Y. MITSKEVICH, S. BRINKEVICH, S. VABISHCHEVICH, Е. BURYI, S. LASTOVSKII

58-64