INTEGRATED SYSTEM OF MULTICOORDINATE MOVEMENTS FOR ASSEMBLY EQUIPMENT OF MICROELECTRONICS

Abstract

The article is devoted to a new approach of construction of assembly equipment for microelectronics; according to this approach the motion system of assembly equipment is configured on multicoordinate drives and parallel kinematics mechanisms. The control of motion system is based on developed algorithms, which use the digital information from vision system. The solution of direct and inverse kinematics problem of the offered parallel kinematics mechanism is given; it is based on mathematical models, which describe its topology and kinematics. The program which allows performing the step simulation and visualization of position and orientation of mechanism carriage in accordance with the changing on each step input variable parameters was developed. The integrated system of multicoordinate movements allows creating perspective assembly equipment for microelectronics with high target characteristics on new element base. The scheme of the embedding of developed motion system into equipment was given, and achieved characteristics of accuracy, velocity and acceleration were shown.