ELEKTRON AND ION SOURCE FOR REALIZATION THE COMBINED INFLUENCE ON THE SURFACE
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Abstract
The developed design of electrode structure with system of its power supplies is presented, allowing to carry out alternate extraction electrons and ions from gas discharge plasma and to realise the combined influence on a surface of a material bunches low energetic the charged particles are ions and electrons. The received experimental characteristics of the developed structures are presented. The received results testify to possibility of application of similar structures for realisation of some technologies of updating of surfaces.
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References
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