PLASMA ELECTRON AND IONIC SOURCE
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Abstract
The results of experimental study of emission characteristics of a plasma electron and ionic source with plasma expander at different potentials are shown. It is shown that in the developed source with the change of polarity of extracting voltage and without construction changing can be obtained low-energy electrons and ion beams with parameters sufficient for realization of a number of particle-beam technologies – modification of the properties of surfaces with variable periodic exposed to the ion and electron beams in a single technological cycle can be obtained.
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References
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