OPTICAL AND STRENGTH PROPERTIES OF SACRIFICIAL LAYERS BASED ON POLYIMIDE FILMS
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Abstract
Optical and strength properties of films of a polyimide composition (polyimide PI-2610) for creating a sacrificial layer deposited on the surface of single-crystal silicon plates of the KDB-10 brand by centrifugation are investigated. It has been established that they behave like elastoplastic materials. The true microhardness of polyimide PI-2610, measured at a load of 2 g, was ~0,5 GPa. The spectra of the disturbed total internal reflection (NPVO) of polyimide PI-2610 were compared with the spectra of the NPVO of pyrrole and kapton polyimide. In the spectrum of the polyimide PI-2610, there are bands of vibrations of the 5-membered ring and valence vibrations of the C–Nst and CO–Cst groups. The most intense band in the spectrum of NPVO (as in pyrrole) is the band of deformation vibrations C-H with a maximum at 734 cm-1. The band at ~1700 cm-1, caused by valence vibrations of the C=O double bond, has two closely spaced maxima at 1706 and 1692 cm-1, which indicates two variants of the force field around the C=O bond. The presence of hydroxyl O–H groups in the spectra of polyimide PI-2610 was detected due to the presence of residual water in the polyimide structure.
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References
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