OPTICAL AND STRENGTH PROPERTIES OF SACRIFICIAL LAYERS BASED ON POLYIMIDE FILMS
Article Sidebar
Main Article Content
Abstract
Optical and strength properties of films of a polyimide composition (polyimide PI-2610) for creating a sacrificial layer deposited on the surface of single-crystal silicon plates of the KDB-10 brand by centrifugation are investigated. It has been established that they behave like elastoplastic materials. The true microhardness of polyimide PI-2610, measured at a load of 2 g, was ~0,5 GPa. The spectra of the disturbed total internal reflection (NPVO) of polyimide PI-2610 were compared with the spectra of the NPVO of pyrrole and kapton polyimide. In the spectrum of the polyimide PI-2610, there are bands of vibrations of the 5-membered ring and valence vibrations of the C–Nst and CO–Cst groups. The most intense band in the spectrum of NPVO (as in pyrrole) is the band of deformation vibrations C-H with a maximum at 734 cm-1. The band at ~1700 cm-1, caused by valence vibrations of the C=O double bond, has two closely spaced maxima at 1706 and 1692 cm-1, which indicates two variants of the force field around the C=O bond. The presence of hydroxyl O–H groups in the spectra of polyimide PI-2610 was detected due to the presence of residual water in the polyimide structure.
Article Details
This work is licensed under a Creative Commons Attribution 4.0 International License.
References
Brinkevich, D. I., Lukashevich, M. G., Prosolovich, V. S., Harchenko, A. A., Vabishchevich, S. A., & Vabishchevich, N. V. (2017). Mikrotverdost' plenok poliimida i polietilentereftalata, obluchennyh gamma-kvantami 60Co [Microhardness of polyimide and polyethylene terephthalate films irradiated with 60Co gamma quanta]. Vestnik Polotskogo gosudarstvennogo universiteta. Seriya C. Fundamental'nye nauki [Herald of Polotsk State University. Series С. Fundamental sciences], (12), 30–34. (In Russ., abstr. in Engl.).
Brinkevich, D. I., Vabishchevich, N. V., & Vabishchevich, S. A. (2009). Prochnostnye svojstva termoobrabotannogo kremniya, vyrashchennogo v magnitnom pole. Vestnik Polotskogo gosudarstvennogo universiteta. Seriya C. Fundamental'nye nauki [Herald of Polotsk State University. Series С. Fundamental sciences], (3), 152–157. (In Russ.).
Brinkevich, D. I., Vabishchevich, N. V., & Vabishchevich, S. A. (2010). Fiziko-mekhanicheskie svojstva epitaksial'nyh sloev fosfida galliya [Physicomechanical properties of epitaxial layers gallium phosphide] // Vestnik Polotskogo gosudarstvennogo universiteta. Seriya C. Fundamental'nye nauki [Herald of Polotsk State University. Series С. Fundamental sciences], (9), 92–97. (In Russ., abstr. in Engl.).
Brinkevich, S. D., Grinyuk, E. V., Brinkevich, D. I., & Prosolovich, V. S. (2020). Modifikaciya plenok diazohinonnovolachnogo fotorezista za oblast'yu vnedreniya ionov B+. Himiya vysokih energij, 54(5), 377–386. (In Russ.). DOI: 10.31857/S0023119320050046. (Brinkevich, S. D., Grinyuk, E. V., Brinkevich, D. I., & Prosolovich, V. S. (2020). Modification of Diazoquinone–Novolac Photoresist Films beyond the Region of Implantation of B+ Ions. High energy chemistry, 54(5), 342–351). DOI: 10.1134/S0018143920050045.
Vabishchevich, N. V., Vabishchevich, S. A., Brinkevich, D. I., & Brinkevich, S. D. (2009). Mikrotverdost' struktur polimer – kremnij. Vestnik Polotskogo gosudarstvennogo universiteta. Seriya C. Fundamental'nye nauki [Herald of Polotsk State University. Series С. Fundamental sciences], (9), 97–102. (In Russ.).
Vabishchevich, S. A., Vabishchevich, N. V., Brinkevich, D. I., Prosolovich, V. S., Yankovskij, Yu. N., & Brinkevich, S. D. (2016). Prochnostnye svojstva struktur fotorezist-kremnij, γ-obluchennyh i implantirovannyh ionami B+ i P+ [Strength properties of photoresist-silicon structures, γ-irradiated and implanted by B+ and P+ ions]. Vestnik Polotskogo gosudarstvennogo universiteta. Seriya C. Fundamental'nye nauki [Herald of Polotsk State University. Series С. Fundamental sciences], (12), 30–36. (In Russ., abstr. in Engl.).
Brinkevich, D. I., Odzhaev, V. B., Petlickij, A. N., & Prosolovich, V. S. (2011). Rostovye kislorodsoderzhashchie defekty v kremnii, vyrashchennom v slabom vertikal'nom magnitnom pole. Mikroelektronika, 40(4), 309–312. (In Russ.). (Brinkevich, D. I., Odzhaev, V. B., Petliskii, A. N., & Prosolovich, V. S. (2011). Growth oxygen-containing defects in silicon grown in a weak vertical magnetic field. Russian Microelectronics, 40(4), 290–293).
Tarasevich, B. N. (2012). IK spektry osnovnyh klassov organicheskih soedinenij. Spravochnye materialy [IR spectra of the main classes of organic compounds. Reference materials]. Moscow: MGU. (In Russ.).
Prech, E., Byul'mann, F., & Affol'ter, K. (2006). Opredelenie stroeniya organicheskih soedinenij. Tablicy spektral'nyh dannyh [Determination of the structure of organic compounds. Spectral data tables]. Moscow: Mir, Binom. (In Russ.).
Avanesyan, V. T., Vaganov, G. V., Rakina, A. V., & Platko, A. P. (2015). Opticheskie spektry termostojkih polimernyh plenok setchatoj struktury. In Fundamental'nye problemy radioelektronnogo priborostroeniya (INTERMATIC-2015), ch. 2 (112–114). Moscow: MIREA. (In Russ.).
Hejnonen, I. V., Mamedov, R. K., Bobasheva, A. S., Lajus, L. A., & Zolotarev, V. M. (1998). Issledovanie molekulyarnoj orientacii v poverhnostnyh sloyah poliimidnyh plenok metodom spektroskopii nareshennogo polnogo vnutrennegootrazheniya v oblasti osnovnyh kolebatel'nyh polos [Study of Molecular Orientation in Surface Layers of Polyimide Films by Attenuated Total Internal Reflection Spectroscopy in the Region of Main Vibrational Bands]. Vysokomolekulyarnye soedineniya [Polymer Science], 40(9), 1526–1530.
Harchenko, A. A., Fedotova, Yu. A., Zur, I. A., Brinkevich, D. I., Brinkevich, S. D., Grinyuk, E. V., … Lastovskij, S. B. (2022). Radiacionno-inducirovannye processy v strukturah DLC/poliimid pri obluchenii -kvantami 60So. [Processes Induced in DLC/Polyimide Structures by Irradiation with 60Co γ-Rays]. Himiya vysokih energij [High energy chemistry], 56(5), 378–387. DOI: 10.31857/S0023119322050059.