ELECTRON IRRADIATED PI2610 POLYIMIDE FILMS ON MONOCRYSTALLINE SILICON
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Abstract
The optical and strength properties of electron-irradiated films of a polyimide composition (polyimide PI2610) deposited on the surface of single-crystalline silicon wafers of the KDB-10 grade by centrifugation were studied. Irradiation with electrons with an energy of 5 MeV was carried out on a linear accelerator U-003 in the dose range 1·1014 – 2·1015 cm–2. It has been experimentally established that at an irradiation dose of Ф = 1∙1014 cm–2, relaxation of elastic stress fields in the polyimide film is observed, which is expressed in modification of the shape of bands with maxima at 1349 and 1700 cm–1, caused by vibrations of the C–N–Cst bond and the C=O double bond imide ring. Polyimide PI-2610 films on silicon are quite stable when irradiated with electrons. A noticeable transformation of the ATR spectrum at a dose of 2∙1015 cm–2 was observed only in the region of stretching vibrations of C–H and O–H bonds, which is due to radiation-induced processes on by-products of polyimide synthesis and residual solvents. No noticeable decrease in the intensity of absorption bands caused by vibrations of the skeleton of the aromatic ring, imide ring, single and double C–C and C–O bonds, and imide C=O bonds was observed.
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References
Zawierta, M., Martyniuk, M., Jeffery, R. D., Putrino G., Keating A., Dilusha Silva, K. K. M. B., & Faraone, L. (2017). Control of Sidewall Profile in Dry Plasma Etching of Polyimide. Journal of Microelectromechanical Systems, 26(3), 593–600. DOI: 10.1109/JMEMS.2017.2681106.
Zhukov, A. A., Zhukova, S. A., Chetverov, Ju. S., & Babaevskij, P. G. (2005). Plazmohimicheskie obrabotki poliimidnyh «zhertvennyh» sloev v tehnologii mikrobolometrov [Plasma and chemical treatments of polyimide "sacrificial" layers in processing of microbolometers]. Prikladnaja fizika [Applied Physics], (6), 154–159. (In Russ., abstr. in Engl.).
Korshak, V. V., Ljashevich, V. V., Rodje, V. V., & Vygodskij, Ja. S. (1980). Povedenie poliimida na osnove anilinftaleina i piromellitovogo diangidrida pod dejstviem γ-izluchenija. Vysokomolekuljarnye soedinenija, А22(11), 2559–2566. (In Russ.).
Brinkevich, D. I., Vabishchevich, N. V., & Vabishchevich, S. A. (2009). Prochnostnye svojstva termoobrabotannogo kremniya, vyrashchennogo v magnitnom pole. Vestnik Polotskogo gosudarstvennogo universiteta. Seriya C. Fundamental'nye nauki [Herald of Polotsk State University. Series С. Fundamental sciences], (3), 152–157. (In Russ.).
Brinkevich, D. I., Vabishchevich, N. V., & Vabishchevich, S. A. (2010). Fiziko-mekhanicheskie svoistva epitaksial'nykh sloev GaP [Physical and mechanical properties of GaP epitaxial layers]. Vestnik Polotskogo gosudarstvennogo universiteta. Seriya C, Fundamental'nye nauki [Herald of Polotsk State University. Series С. Fundamental sciences], (9), 92–97. (In Russ., abstr. in Engl.).
Brinkevich, S. D., Grinyuk, E. V., Brinkevich, D. I., & Prosolovich, V. S. (2020) Modification of Diazoquinone–Novolac Photoresist Films beyond the Region of Implantation of B+ Ions. High energy chemistry, 54(5), 342–351. DOI: 10.1134/S0018143920050045.
Vabishchevich, S. A., Vabishchevich, N. V., Brinkevich, D. I. Prosolovich, V. S., Kolos, V. V., & Zubova, O. A. (2022). Opticheskie i prochnostnye svojstva zhertvennyh sloev na osnove poliimidnyh plenok [Optical and Strength Properties of Sacrificial Layers Based on Polyimide Films]. Vestnik Polotskogo gosudarstvennogo universiteta. Seriya C,
Fundamental'nye nauki [Herald of Polotsk State University. Series С. Fundamental sciences], (11), 53–58. DOI: 10.52928/2070-1624-2022-39-11-53-58. (In Russ., abstr. in Engl.).
Vabishchevich, S. A. Vabishchevich, N. V., Brinkevich, D. I., Brinkevich, S. D., & Prosolovich, V. S. (2016). Mikrotverdost' plenok sopolimerov na osnove metilmetakrilata, obluchennyh γ-kvantami [Microhardness of Γ-Irradiated Films of Copolymers Based on Methyl Methacrylate]. Vestnik Polotskogo gosudarstvennogo universiteta. Seriya C, Fundamental'nye nauki [Herald of Polotsk State University. Series С. Fundamental sciences], (12), 51–57. (In Russ., abstr. in Engl.).
Tarasevich, B. N. (2012). IK spektry osnovnyh klassov organicheskih soedinenij. Spravochnye materialy [IR Spectra of the Main Classes of Organic Compounds. Reference Materials]. Moscow: MGU. (In Russ.).
Kharchenko, A. A., Brinkevich, D. I., Brinkevich, S. D., Lukashevich, M. G., & Odzhaev, V. B. (2015). Radiationinduced modification of polymer surfaces. J. of Surface Investigation. X-ray, synchrotron and neutron techniques, 9(2), 371–376. DOI: 10.1134/S1027451015020317.
Brinkevich, D. I., Kharchenko, A. A., Brinkevich, S. D., Lukashevich, M. G., Odzhaev, V. B., Valeev, V. F., … Khaibullin, R. I. (2017). Radiation-induced modification of reflection spectra beyond the ion path region in polyimide films.
J. of Surface Investigation. X-ray, synchrotron and neutron techniques, 11(4), 801–806. DOI: 10.1134/S1027451017040188.
Kharchenko, A. A., Fedotova, Yu. A., Zur, I. A., Brinkevich, D. I., Brinkevich, S. D., … Lastovskii, S. B. (2022). Processes Induced in DLC/Polyimide Structures by Irradiation with 60Co γ-Rays. High Energy Chemistry, 56(5), 354–362. DOI: 10.1134/s0018143922050058.
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