Published: 2025-04-18

FILMS OF THE NEGATIVE PHOTORESIST AZ nLOF 5510, IRRADIATED BY ELECTRONS

S. ABRAMOV, D. BRINKEVICH, V. PROSOLOVICH, O. ZUBOVA, S. VABISHCHEVICH, N. VABISHCHEVICH, ZOIR T. KENZHAEV, S. LASTOVSKII

39-46

INDENTATION OF NEGATIVE PHOTORESIST FILMS FOR LIFT-OFF LITHOGRAPHY

S. VABISHCHEVICH, BRINKEVICH BRINKEVICH, V. PROSOLOVICH, O. ZUBOVA, O. TANANA, N. VABISHCHEVICH, B. K. ISMAYLOV

53-60